메뉴 건너뛰기

Thin Film Deposition System

Modular PVD System - The HEX Series (Korvus Technology, UK)

HEX Series Thin Film Deposition Systems

The HEX Series is a modular platform designed for flexibility and user customization. Key features include:

  • Modular Design: The HEX systems allow users to configure and upgrade their setups easily, accommodating various deposition techniques such as e-beam evaporation, RF and DC sputtering, and thermal evaporation. 
  • User Control: The systems can be operated both manually and automatically, providing a high level of control over the deposition process. 
  • Applications: The HEX Series is utilized for a range of applications, including thin film training programs, contact metallization, and the fabrication of solid-state batteries.

HEX Series Glovebox Integration

HEX Series Glovebox Integration

 

Integrating your HEX or HEX-L into a glovebox is crucial when working with air-sensitive materials. The HEX Series’ unique modularity allows this to be done differently to conventional PVD systems.

 

Gloveboxes are inert environments, usually filled with argon, wherein air-sensitive materials can be stored and worked on. Researchers may wish to integrate their PVD chamber into a glovebox if they wish to work with organic substrates or volatile metals like lithium.

Conventional glovebox integration involves placing the PVD chamber directly inside a glovebox, which can take up a huge amount of room and present contamination risks. One of the primary benefits of the design of the HEX Series is that both systems (HEX and HEX-L) can instead be integrated into a glovebox through the floor. 

This minimises the space taken up inside the glovebox, as well as providing easy access to substrates. Additionally, the fact that the chamber panels of the HEX series sit below the glovebox means that any chamber cleaning can be carried out easily and without contaminating the glovebox.

This integration process does not need to be performed upon purchase of a HEX or HEX-L- the chamber can be integrated and/or removed from the glovebox at any point after purchase.

share
진공 증착시스템 HEX MINI THE HEX SERIES Single Source Desktop PVD Coater HEX-Mini는 박막 생성을 위한 Korvus Technology의 소형 입문용 PVD시스
댓글 0
188
진공 증착시스템 HEX-XL, Larger mobile base-stand-mounted PVD system THE HEX SERIES HEX-XL, Larger mobile base-stand-mounted PVD system Maximum Sample Size Diameter: up
댓글 0
182
진공 증착시스템 Customisations of PVD System KORVUS TECHNOLOGY Seemless Integration of third-party instruments - An unrivalled ability to be cust
댓글 0
58
진공 증착시스템 HEX UHV THE HEX SERIES World's Most Modular UHV System The HEX UHV is the latest development in the HEX ser
댓글 0
101
진공 증착시스템 HEX Steel HEX-L Steel beside the HEX Steel THE HEX SERIES Chamber material to suit your research Although we
댓글 0
112
증착장비 부속품 TAU UHV THE HEX SERIES 4 Pocket Mini E Beam Evaporator 4 Pocket Mini Electron-Beam Source Sequential or Co-
댓글 0
105
진공 증착시스템 PVD Cluster Systems THE HEX SERIES PVD Cluster Systems Staying true to our philosophy of flexibility and upgradability,
댓글 0
875
증착장비 부속품 HEX Thin Film Deposition Sources The HEX Series facilitates a range of deposition sources. These can be mixed and matched to the end-
댓글 0
865
증착장비 부속품 Sample Stages Sample Stage Options Choosing the correct sample stage for a process is as important as choosing the
댓글 0
736
증착장비 부속품 Thin Film Deposition Components & Software  Thin Film Deposition Components & Software Niobium Software The custom software supplied with th
댓글 0
769
증착장비 부속품 HEX Series Glovebox Integration HEX Series Glovebox Integration Integrating your HEX or HEX-L into a glovebox is crucial when workin
댓글 0
718
문의
하기