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Thin Film Deposition System

Modular PVD System - The HEX Series (Korvus Technology, UK)

HEX Series Thin Film Deposition Systems

The HEX Series is a modular platform designed for flexibility and user customization. Key features include:

  • Modular Design: The HEX systems allow users to configure and upgrade their setups easily, accommodating various deposition techniques such as e-beam evaporation, RF and DC sputtering, and thermal evaporation. 
  • User Control: The systems can be operated both manually and automatically, providing a high level of control over the deposition process. 
  • Applications: The HEX Series is utilized for a range of applications, including thin film training programs, contact metallization, and the fabrication of solid-state batteries.

TAU UHV

THE HEX SERIES

4 Pocket Mini E Beam Evaporator

 

 
  • 4 Pocket Mini Electron-Beam Source
  • Sequential or Co-Evaporation
  • Flux Monitoring Electrodes
  • Water-Cooled
  • From CF63 Mounting Flange
  • 250C Bakeout Temperature
  • Up to 800mm Length

 

 

The TAU UHV is a UHV-compatible four-pocket electron-beam evaporation source for thin-film deposition. The TAU UHV is the UHV version of our proprietary source.

Configurable to different flange sizes and angles, the TAU UHV can be fitted to any existing deposition system.

A compact and powerful tool for evaporating metals, the TAU UHV can evaporate up to four pockets simultaneously or sequentially. Each pocket can be equipped with crucibles or rods.

 

 

 

 


 

 

 


 

 

 


 

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